We use 1813 on top of LOR-B for metal liftoff as well as AZ-5214 with image reversal. Both processes give a nice undercut profile for lift-off. If either of these are options for you, I can give you specific processes. AZ-5214 is nice to have around because it can be used either as a positive or a negative-tone resist. BTW, also make sure that metal evaporation is normal to your substrate, i.e. the sample is placed directly over the metal source in evaporator or sputterer. This will help ensure clean lift-off because the resist side-walls are less likely to have metal on them. -Bill Lanford-Crick -----Original Message----- From: mems-talk-bounces+wlanford=uiuc.edu@memsnet.org [mailto:mems-talk-bounces+wlanford=uiuc.edu@memsnet.org]On Behalf Of Karin Buchholz Sent: Friday, December 05, 2003 1:40 AM To: General MEMS discussion Subject: Re: [mems-talk] Lift-Off Hi Bernd, we use the Microposit S1818 for Lift-off, it is quite thick (the last two numbers are related to the thickness, so the S1805 is much thinner at the same spin rate) p.e.the S1818 is arond 1.6 µm @ 6000 rpm, 40s. To get an undercut you can also try to put the samples 15 min in Chlorobenzene after the softbake and exposure before the development. (Chlorobenzene is tumourigenic, so use a well ventilated place and prevent Daylight exposure during the 15 min, p.e. by aluminum Foil) Good luck, Karin Krueger, Bernd (Unaxis Optics BZ) schrieb: >Dear All, > >does anybody has experience in a metal-lift-off-process? I am searching for >a resist working fine for soft metal with a thickness of about 300nm. May be >you can advise me either negative or positive resists. > >I would appreciate any help, >Thanks in advance, > >Bernd Krueger > -- Dipl.-Ing. Karin Buchholz Walter Schottky Institut Technische Universitaet Muenchen email: buchholz@wsi.tum.de _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/