durusmail: mems-talk: A problem about Pt temperature sensor
A problem about Pt temperature sensor
2003-12-14
A problem about Pt temperature sensor
zhgf
2003-12-14
Hi everyone,
I want making a temperature sensor with Pt resistor. Can I diretly deposit Pt
onto Silicon?

I know about Pt doesn't adhere to silicon surface well. Generally, chromium is
used as the brazing metal layer between Pt and Silicon. However, if chromium
maybe make some bad effect on the linearity and sensitivity of the sensor or
not?

Gaofei Zhang
Precision Instrument and Mechanology Dept.
Tsinghua University, 100084,P.R.China
+86(10)62776000-805
reply