Hi Shekhar, We do sputter SiN with RF as well as DC sputtering on glass, Silicon, Plastic etc. Please let me know if you need any specific information. Ravi Mullapudi Hionix, Inc. 2157 O'Toole Ave., Suite: E San Jose, CA 95131 www.hionix.com -----Original Message----- From: Indu Shekhar Bajpayee ; JPA(DFM) [mailto:is_bajpayee@ece.iitkgp.ernet.in] Sent: Tuesday, December 16, 2003 11:33 PM To: mems-talk@memsnet.org Subject: [mems-talk] SiN deposition on glass anybody have experience with the deposition of SiN on the glass substrate with the help of RF sputtering unit. kindly guide me. thanks INDU SHEKHAR BAJPAYEE JPA, MICROELECTRONICS CENTER INDIAN INSTITUTE OF TECHNOLGY KHARAGPUR WEST BENGAL -721302 --- Incoming mail is certified Virus Free. Checked by AVG anti-virus system (http://www.grisoft.com). Version: 6.0.536 / Virus Database: 331 - Release Date: 11/3/2003 --- Outgoing mail is certified Virus Free. Checked by AVG anti-virus system (http://www.grisoft.com). Version: 6.0.536 / Virus Database: 331 - Release Date: 11/3/2003