Hi Ravi.... thanks for the reply. i need some information regarding the power , pressure, the gases and their flow rate ratio for the RF sputtering.i am using Technics 4400 machine.Kindly tell me the depositon rates at various parameters. additionly, i have deposited the same on few samples, but unable to clarify whether it is depoaited on the glass or not, however it is deposited on the Si placed with glass.will it reflect any color.. thanks.. INDU SHEKHAR BAJPAYEE JPA, MICROELECTRONICS CENTER INDIAN INSTITUTE OF TECHNOLGY KHARAGPUR WEST BENGAL -721302