Hi,

        The way to tell whether there is a SiN film on glass is more
difficult but still possible by using a hard and sharp object (eg.
scribe pen) to scratch the edge area of the glass wafer. If there is SiN
film on glass, the scratched line should look "powdery" on both sides
along the line. If it is pure glass, it should be a "clean" line. You
could always use SIMS, XPS, FTIR etc. to tell if you have those
facilities.


Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
iwchan@venus.uwaterloo.ca
http://www.ece.uwaterloo.ca/~a-sidic


On Fri, 19 Dec 2003, Indu Shekhar Bajpayee ; JPA(DFM) wrote:

> Hi Ravi....
> thanks for the reply.
> i need some information regarding the power , pressure, the gases and
> their flow rate ratio for the RF sputtering.i am using Technics 4400
> machine.Kindly tell me the  depositon rates at various parameters.
> additionly, i have deposited the same on few samples, but unable to
> clarify whether it is depoaited on the glass or not, however it is
> deposited on the Si placed with glass.will it reflect any color..
> thanks..
>
> INDU SHEKHAR BAJPAYEE
> JPA, MICROELECTRONICS CENTER
> INDIAN INSTITUTE OF TECHNOLGY
> KHARAGPUR
> WEST BENGAL -721302
>
>
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