durusmail: mems-talk: Loss tangent of Si, SiO2, and Si3N4.
Silicon Nitride vs. Silicon dioxide
2003-12-21
Loss tangent of Si, SiO2, and Si3N4.
Loss tangent of Si, SiO2, and Si3N4.
Park, Daniel Sang-Won
2003-12-22
Hi, all.
I'm trying to get data for the loss tangent of Si, SiO2, and Si3N4.
I'd really appreciate if anyone provides me with such information or source.

Best regards.

Daniel Sang-Won Park
Graduate Research Assistant
UTD MiNDS (http://www.utdallas.edu/~jblee/research/index.html) Lab
[Cell] 214-952-8649, [Fax] 972-883-6839
[E-mail] spark@utdallas.edu
[Web] http://www.utdallas.edu/~spark



reply