durusmail: mems-talk: Photocurable PDMS
Photocurable PDMS
2003-12-23
2003-12-24
PAN etch Nickle
2003-12-30
wet etching Ni edge is rough Re: [mems-talk] PAN etch Nickle
2004-01-01
2004-01-03
Photocurable PDMS
Z.,W.Y.(Lydia)
2003-12-23
Dear All,

I read several posts regarding to adding photo initiator(DMAP)to PDMS so that
PDMS can become UV sensitive. I failed to repeat it. Highly appreciated if
anyone can share the recipes in detail. Such as, are Pre-bake, or post-bake
reqired? what is the temprature for baking? how long the exposure time? Can
the mixture be use instantly after mixing? What color the mixture should be?

I tried Dow Corning (Sylgard 184) and (Gelest RMS-033). After mixing DMAP,
Tulene, and PDMS, I degased the mixture and span coat the mixture to pre-RCA
cleaned Si wafer. The UV wavelength is 405nm. I exposed up to 1 hour with
contact printing!!! I develped it in Xylene and IPA dry. Not work!

Merry X'mas and Happy New Year!

Lydia

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