Dear Lydia,

The PAN etch you describe should etch nickel, but very slowly.  Transene
Company offers nickel etchants in quantities as small as one quart.  Please
visit our web site www.transene.com.

Christopher Christuk
Transene Company
Tel:  978 777 7860
email:  christopher@transene.com
----- Original Message -----
From: "Z.,W.Y.(Lydia)" 
To: "General MEMS discussion" 
Sent: Tuesday, December 30, 2003 11:54 AM
Subject: [mems-talk] PAN etch Nickle


> Dear All,
>
> Is it possible to etch nickle using PAN (Phosphoric Acid (H3PO4)
> :Acetic Acid (HAc): Nitric Acid (HNO3): DI water = 16:1:1:2)? And what
> temperature?
>
> I try to etch nickle on top of silicon wafer and using PR as mask. Try to
save
> some money instead of buying nickle etchant.
>
> Happy New Year!
>
> Lydia
>
>
>
>
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