Chris:
    I used transene Ni etch TFB to etch 1500A Ni at RT( hard baked PR AZ5214
as mask), I always has non-uniform side etch on the scale of 1um.  This PR
work fine for other metal etch( Al, Au, Mo...), so I think this Ni etch
attack PR. Can you advise on that. Thanks.
----- Original Message -----
From: "Customer Service" 
To: "General MEMS discussion" 
Sent: Friday, January 02, 2004 6:53 AM
Subject: Re: [mems-talk] PAN etch Nickle


> Dear Lydia,
>
> The PAN etch you describe should etch nickel, but very slowly.  Transene
> Company offers nickel etchants in quantities as small as one quart.
Please
> visit our web site www.transene.com.
>
> Christopher Christuk
> Transene Company
> Tel:  978 777 7860
> email:  christopher@transene.com
> ----- Original Message -----
> From: "Z.,W.Y.(Lydia)" 
> To: "General MEMS discussion" 
> Sent: Tuesday, December 30, 2003 11:54 AM
> Subject: [mems-talk] PAN etch Nickle
>
>
> > Dear All,
> >
> > Is it possible to etch nickle using PAN (Phosphoric Acid (H3PO4)
> > :Acetic Acid (HAc): Nitric Acid (HNO3): DI water = 16:1:1:2)? And what
> > temperature?
> >
> > I try to etch nickle on top of silicon wafer and using PR as mask. Try
to
> save
> > some money instead of buying nickle etchant.
> >
> > Happy New Year!
> >
> > Lydia
> >
> >
> >
> >
> > -------------------------------------------------
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> >
> >
> >
>
>
>
>