If your devices are not fragile, you could try doing an ultrasonic cleaning
in Acetone. We often use this method to remove toughened resist.

___________________________________________________________
Jason Viotty
Senior Process Engineer
C2V
http://www.c2v.nl
___________________________________________________________


-----Original Message-----
From: Nadav Agian [mailto:Nadav.Agian@remonmedical.com]
Sent: dinsdag 30 december 2003 12:38
To: mems-talk@memsnet.org
Subject: [mems-talk] AZ5214 remover


I am using an AZ5214 P.R as a protective coating for dicing .
I tried to remove the coating with Acetone , but I still have some residuals
around the Al lines.
Is there a better way to remove those marks ?


Nadav
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