I tried to remove s1818 layer after I deposited my
designed layer. I used MF319 as I did always but it
didn't removed s1818 layer clearly. I tried to use
acetone to remove this s1818 layer but it failed.
some remained s1818 layer covered my design layer.
I tried to use shipley 1165 remover but it failed.
I'm thinking of using RIE. But I'm afraid it could
hurt the seed layer also.

Anybody have any idea of removing this layer?

If you let me know it then it would be very great.

Thanks,

Sokwon Paik
Ph.D student
Texas A&M University

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