I've used Baker ALEG-355 (heated to 70C) as a solvent for removing
stubborn PR. It typically doesn't attack metals. Perhaps that will work.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Facts are stubborn, but statistics are more pliable."
   -- Mark Twain

On Mon, 5 Jan 2004, sokwon Paik wrote:

>
> I tried to remove s1818 layer after I deposited my
> designed layer. I used MF319 as I did always but it
> didn't removed s1818 layer clearly. I tried to use
> acetone to remove this s1818 layer but it failed.
> some remained s1818 layer covered my design layer.
> I tried to use shipley 1165 remover but it failed.
> I'm thinking of using RIE. But I'm afraid it could
> hurt the seed layer also.
>
> Anybody have any idea of removing this layer?
>
> If you let me know it then it would be very great.
>
> Thanks,
>
> Sokwon Paik
> Ph.D student
> Texas A&M University
>
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