Dear Mems-Talk Users, Is YBCO a contaminant material for the III-V and II-VI processing environement ? We plan to sputter YBCO in a chamber used for GaAs and HgCdTe processing. May any residue of YBCO become harmful to these materials ? Thank you for your answers, Best regards, Oray Orkun Cellek Research Assistant, Ph. D. Student Electrical & Electronics Engineering Department Middle East Technical University 06531 Ankara Turkey Tel : +90 312 210 4579 Fax : +90 312 210 1261 e-mail : o.o.cellek@ieee.org