durusmail: mems-talk: Etching Problem
Etching Problem
2004-01-16
2004-01-16
2004-01-18
2004-01-24
Etching Problem
hare krishna
2004-01-16
Dear All,

I am a student of M.Tech in IIT Kanpur and i am working in the field of
electronic materials.
I have to etch gold and nickel, but the microetchant should not affect the
negative photoresist (SC100).The film deposited is
Silicon (substrate) / Nickel / Gold / photoresist(during pattering). I have used
aquaregia (aquaregia:water :: 1:2 ) for 5 min.,for the microetching of both
nickel and gold but it stripped away the photoresist only.
What should i do now.

Thanking You
Your's Sincerely
Hare Krishna

Yahoo! India Mobile: Ringtones, Wallpapers, Picture Messages and more.Download
now.
reply