durusmail: mems-talk: Platinum Sputtering
Platinum Sputtering
2004-01-18
2004-01-20
Platinum Sputtering
Kamal Kishore
2004-01-18
Hello Friends

        can anyone suggest something about the adhesion properties of
sputtered platinum on Silicon/Silicon Dioxide/silicon Nitride or Silicon
oxynitride? Which of all these substrate is best suitable from this point
of view?

        Also i want to know about some facility in india who are capable
of sputtering platinum? Can anyone help me out?

Regards

kamal









     Kamal Kishore                     Phone :(0172) 2237401 to 10
     Engineer,VLSI:FAB                 Ext:576,550,570,441
     Semiconductor Complex Limited.    Fax:(0172)-2236378,2236885
     Sector 72(Indl.Area),S A S Nagar,
     Mohali, Punjab- 160071






reply