The force applied per deflection can be defined as F/z=(w*E*t^3)/(4L^3) ,
here F-force,z-deflection,w-width,t-thickness, L-length of cantilever and E
is the Young's modulus. For detail info. you can look at our recent paper,
Journal of Micromechanics and Microengineering, volume 14, issue 3, pages
374 - 381, (2004).

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Isa Kiyat