Pt does not adhere well to Si /SiO2.use a thin layer of Cr, Ti , TaN and then
sputter Pt.
         Hope this helps,
                   Dipankar

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--------- Original Message ---------

DATE: Sun, 18 Jan 2004 17:35:07
From: Kamal Kishore 
To: mems-talk@memsnet.org
Cc:

>
>Hello Friends
>
>       can anyone suggest something about the adhesion properties of
>sputtered platinum on Silicon/Silicon Dioxide/silicon Nitride or Silicon
>oxynitride? Which of all these substrate is best suitable from this point
>of view?
>
>       Also i want to know about some facility in india who are capable
>of sputtering platinum? Can anyone help me out?
>
>Regards
>
>kamal
>
>
>
>
>
>
>
>
>
>     Kamal Kishore                     Phone :(0172) 2237401 to 10
>     Engineer,VLSI:FAB                 Ext:576,550,570,441
>     Semiconductor Complex Limited.    Fax:(0172)-2236378,2236885
>     Sector 72(Indl.Area),S A S Nagar,
>     Mohali, Punjab- 160071
>
>
>
>
>
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