durusmail: mems-talk: Quickly dissolving thick PMMA
Quickly dissolving thick PMMA
2004-02-02
2004-02-02
2004-02-02
2004-02-03
2004-02-03
2004-02-04
2004-02-04
Quickly dissolving thick PMMA
Michael D Martin
2004-02-03
Will your device withstand a pirhana etch, i.e. Nanostrip?

-MIke


>>> llhunte@sandia.gov 2/2/2004 2:44:36 PM >>>
MEMS folk,

I know that acetone works for dissolving PMMA but is there something
that
will work much faster, maybe 10 times?  PMMA thickness is between 300
microns and 1500 microns.  Currently it takes 3 days to dissolve 1500
micron
thick PMMA in acetone.

Thanks
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