At 03:30 PM 2/2/2004 -0600, you wrote:
>Dear MEMS experts,
>
>I am searching for some type of organic coating that can be spun on or
>brushed on that is insoluble in TMAH at 85°C.  Possibly something that
>is somewhat similar to a photoresist that can also be removed easily
>after the TMAH etch has been completed.  I am seeking to use this as a
>protective mask as opposed to using an oxide mask.  Any suggestions that
>you can provide would be greatly appreciated.
>
>
>
>Preston Larson
>Graduate Research Assistant
>University of Oklahoma
>Dept. of Physics and Astronomy
>440 W. Brooks Street
>Norman, OK 73019
>
I found a product line that might help you at
http://www.brewerscience.com/smproducts/sm_mems_protec.html

We've ordered some to evaluate with KOH and EDP etching.


--
Mark Fuller
Microelectronics Fabrication Facility
Washington State University
Dana Hall 102
Pullman, WA  99164-2711
(509)335-1797