Hi Jan, I had not heard from anyone in a while about my inquiries about dry-film resists and gray-scale lithography, hence just discover your email while cleaning out my email box. Thanks for the feedback. Basically we have tried a negative dry-film resist call Fujifilm Olin VANX (20 microns thick). Our problem was not lamination, but repeatability of grey-scale results (+/- 14%). We need < +/- 7%. It is my understanding that grey-scale lithography should be pursued with only positive photo-resists with low contrast or process means to reduce the apparent contrast of the resist. Jan, I would be appreciative if you or any other reader of this email could point me in the direction of a thick (20-120 micron), positive dry-film resist with reasonably high resolution and low contrast or process means to effect a low contrast. Jan, any thoughts or recommendations? Best regards, Fred E-Business Card Fred Thomas Chief Technologist Advanced Research & Development, R&D Iomega Corporation Building 8 1821 West Iomega Way Roy, Utah 84067 USA P: 801-332-4662 Fax: 801-332-5434 email: thomasf@iomega.com -----Original Message----- From: mems-talk-bounces+thomasf=iomega.com@memsnet.org [mailto:mems-talk- bounces+thomasf=iomega.com@memsnet.org] On Behalf Of Jan Friday Sent: Tuesday, January 27, 2004 9:42 AM To: 'mems-talk@memsnet.org' Subject: [mems-talk] dry film resist Did you solve this problem? I used a different film but had the same thing happen. First of all I had the wrong dilution (too strong) for the developer!! So I rectified that but still had the film coming off the sample. Surface cleanliness is important to get good adhesion, so check that. I found that my film eventually adhered when I increased the exposure time. I had enough exposure before to develop a good pattern but not enough to chemically change the film enough to give it good adhesion to the substrate. Hope this helps. Jan _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/