durusmail: mems-talk: metal deposition on polymer substrates/ Aerogel
metal deposition on polymer substrates/ Aerogel
2004-02-14
metal deposition on polymer substrates/ Aerogel
Pankaj Kaul
2004-02-14
Hi All,

I'm not sure which technique would work for me. I hope to get response from this
forum.

My aim is to get metal deposition 200-300 nm on a polymer film\substrate
specifically Polyaniline thin film or LDPE (Low Density Poly Ethylene) and also
on Aerogel. Nickel Shadow mask is to be used for pattern deposition.

Selection of metal pattern to be deposited is based on linear resistance-
temperature dependence of the metals e.g. Al, Au over a wide range of
temperatures.

I've performed few sputtering trials on these samples over the past weeks using
Magnetron Sputtering (for Al deposition) using Denton Vacuum Discovery systems
and basic diode sputtering configuration , Hummer sputtering systems (for Gold
deposition).

At the same time i'm thinking whether thermal evaporation system should work for
Aerogel.

Only limitations for processing is the glass transition temperature of polymers.
So process temperature should not exceed 40-50 degree celsius.

I would appreciate any comments on this. Especially if somebody could outline
the technique that should work for these samples or at least send me references
that might be helpful.

Thanks,

Kaul







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