I am also trying to etch glass. It seems Cr film should work if the quality
of evaporation is good enough.

Best,
Lanzy

----- Original Message -----
From: "Chen Yan" 
To: 
Sent: Saturday, February 14, 2004 9:39 AM
Subject: [mems-talk] deep glass etching


Hi there,

I am trying to etch some deep channel (~100um) into glass using Cr as mask
using RIE, any one knows a recipe that can do the job? I am using SF6 and
CHF3 gas. Or can use wet etching? what chemical can I use and what mask is
the best for the etching?

Thank you for every help!

Best Regards,
chenyan