I would like to know if there is a good method of coating a hydrophobic (teflon-like) polymer surface with a thin layer (max few nm) of, e.g., monomer to make the surface hydrophilic and solvent-resistant for subsequent lithographic processing. Currently we are using plasma-coating which works fine but spin-coating from a liquid solution would be much more convenient. Thanks Kristjan Leosson kl@mmphotons.dk