durusmail: mems-talk: Coating of hydrophobic polymer surface
RE: jborski@advancedmicrosensors.com - Email found in subject - [mems-talk] ITO Etch selective to glass
2004-02-23
Coating of hydrophobic polymer surface
Surface tension on inclined rigid walls
Coating of hydrophobic polymer surface
Kristjan Leosson
2004-02-24
I would like to know if there is a good method of coating a hydrophobic
(teflon-like) polymer surface with a thin layer (max few nm) of, e.g.,
monomer to make the surface hydrophilic and solvent-resistant for
subsequent lithographic processing.  Currently we are using
plasma-coating which works fine but spin-coating from a liquid solution
would be much more convenient.

Thanks

Kristjan Leosson
kl@mmphotons.dk




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