Hi,

Does anyone have suggestion on how to apply uniform resist on
rectangular shape glass slides (1 x 3 inch)? I tried to spin them with
full coverage of resist on slides, but the result is not good. Resist
sometimes cannot reach corners, and it shows certain interference
pattern under light, indicating the unevenness of resist thickness.
Thank you.

Best,

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XIA, ZHENG
Microfluidics and BioMEMS Lab
Interdisciplinary Microsystems Group
Department of Mechanical and Aerospace Engineering
University of Florida
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