Hi Lu, we use a mixture of 2Vol% HF (40%) and 2Vol% HNO3 for 100nm films. Antje SLU schrieb: > Hello, everybody, > > We're going to etch 500nm and 1um thick Ti film. It takes some time to buy > the pre-mixed etchant, so we are looking for some alternative acid etchant > that may be available in our lab, such as nitrid acid, or sulfric acid. > We'd > appreciate if anybody can share such recipe with us. > > lu > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/