Dear Zheng

You can try making a custom chuck for your spin coater in your machine
shop by milling out a an area 3" x 1" by ~1 mm from a bit of Dural rod.
This will give you a more even flow of resist over and off the surface.

Chris

On Friday, February 27, 2004, at 04:30  pm, Zheng Xia wrote:

> Does anyone have suggestion on how to apply uniform resist on
> rectangular shape glass slides (1 x 3 inch)? I tried to spin them with
> full coverage of resist on slides, but the result is not good. Resist
> sometimes cannot reach corners, and it shows certain interference
> pattern under light, indicating the unevenness of resist thickness.
> Thank you.

--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
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