Hello Zheng,

please try the suggestion of Chris. If this is not successful you can try a
dry resist (from Dupont e.g.) which will not spin but laminated. However,
dry resist is not applicable for all type of processes.
Alternatively you can use a special covered spin coating process or a spray
coating process which are other possibilities for coating rectangular
substrates.
If you are interested in some tests for spray or spin coating with cover (we
call it Gyrset), please contact me direct.

Michael.

  Dr. Michael Hornung
  Application Engineer
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  SUSS MicroTec
  Schleissheimer Str. 90 / D-85748 Garching
  Phone: +49-(0)89 - 32007 - 385
  FAX:   +49-(0)89 - 32007 - 390
  e-mail: m.hornung@suss.de
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----- Original Message -----
From: Christopher F. Blanford 
To: General MEMS discussion 
Cc: Zheng Xia 
Sent: Monday, March 01, 2004 8:09 PM
Subject: Re: [mems-talk] resist on rectangular shape slides


> Dear Zheng
>
> You can try making a custom chuck for your spin coater in your machine
> shop by milling out a an area 3" x 1" by ~1 mm from a bit of Dural rod.
> This will give you a more even flow of resist over and off the surface.
>
> Chris
>
> On Friday, February 27, 2004, at 04:30  pm, Zheng Xia wrote:
>
> > Does anyone have suggestion on how to apply uniform resist on
> > rectangular shape glass slides (1 x 3 inch)? I tried to spin them with
> > full coverage of resist on slides, but the result is not good. Resist
> > sometimes cannot reach corners, and it shows certain interference
> > pattern under light, indicating the unevenness of resist thickness.
> > Thank you.
>
> --
> Christopher F. Blanford
> Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
> Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
> PGP keyID: 8D830BC9  http://pgp.mit.edu/
>
>
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