Hi,

I am searching for some information or guidelines when bonding silicon
nitride to silicon, silicon dioxide or silicon nitride. I found an article

"Spontaneous direct bonding of thick silicon nitride"
S Sanchez, C Gui and M Elwenspoek
J. Micromech. Microeng. 7 (1997) s111-113

which addresses the importance of surface smoothness with CMP before
bonding. Is there any other good references or guidelines I could use before
proceeding with my bonding experiments.

Regards,

Marcus Törndahl

Ps. Thank you for a most interesting and educating forum Ds.
_____________________________________________
Marcus Törndahl (PhD student, MScEE)
Department of Electrical Measurements/LTH
Lund University
Ole Römers väg 3
SE-221 00 Lund
Sweden