durusmail: mems-talk: Release Process
Release Process
1997-03-31
Release Process
Mike Little
1997-03-31
Can anyone give me a recipe for, or a pointer to a recipe for a release
process for photoresist?  I'm using photoresist (AZ5214) as a release layer
for aluminum cantilever structures and am having trouble releasing them
without stiction.

Thanks,
              Mike


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