I may be confused. Are you talking about the marks the A&E tool aligns back
to, or the marks used by a metrology tool (such as KLA) for measuring
alignment?

Robert

Subject: RE: [mems-talk] Alignment marks


Alignment marks are different depending on what A&E tool you use. Different
vendors (ie. Canon, Nikon, etc) use different marks.

Sent: Friday, March 12, 2004 1:34 AM
To: General MEMS discussion
Subject: [mems-talk] Alignment marks


I am designing a photomask. I will have a two step lithography with maximum
0.5 um tolerance. I need your suggestions about the kind of alignment marks
I should use (shape, dimension any experience will help) . Thanks.
=================================

Isa Kiyat




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