>Phil,
>
>Are you certain about this? I have tried this myself using the CMU Nanofab
>STS, and I was not impressed by the performance of that passivation layer
>as a release agent. I found that I got much better performance by coating
>my molds with a fluorosilane from United Chemical Technologies (put a few
>drops in a vial, put vial and molds in standard lab dessicator and connect
>to house vacuum, wait an hour or two).
>
>Alik Widge
>Doctoral Student
>MEMS Laboratory
>Carnegie Mellon University
>
Hi Alik,

I believe it depends on the situation.  The strucutres I dealt with were
shallow trenches made using a KOH etch to allow for any easier molding
process.   If however, the structures were made by the STS and had a high
aspect ratio, then it would be fairly difficult to find any technique to
prevent the PDMS from sticking onto the mold.

Phil Tabada

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