Hello all,

    We met a SU-8 wrinkle problem and would like to
hear any suggestion. The process is to pattern gold on
the un-exposed SU-8 resist. We first piranha etched
the glass slides and baked it for 1hr@200C. The
spun-on SU-8 resist looked good after soft bake. Then
gold was sputtered onto the resist, and it was
patterned by using Shipley 1813 positive resist. After
that, the gold was etched in Transene gold etchant TFA
(a complex of KI/I2), rinsed in DI water, baked at 90C
for 30 mins. The wrinkles showed up during the baking.
Does anyone have the same experience? Any suggestion
welcomed.


__________________________________
Do you Yahoo!?
Yahoo! Small Business $15K Web Design Giveaway
http://promotions.yahoo.com/design_giveaway/