durusmail: mems-talk: KOH etch station for 6"
KOH etch station for 6"
1998-11-20
KOH etch station for 6"
Mike B
1998-11-20
Hello all,

Does anyone know of a supplier for a KOH etch station for 6" wafers?  It
should have drainage, circulation, heating, and all neccessary monitors.

Thanks,

Mike

Michael H. Beggans                              mhb3128@megahertz.njit.edu
New Jersey Institute of Technology (NJIT)       voice: (973) 642-7738
Dept. of Physics                                fax:   (973) 596-5794
University Heights
Newark, NJ 07102


reply