durusmail: mems-talk: SU-8 spin coat
SU-8 spin coat
2004-04-21
2004-04-22
2004-04-22
2004-04-28
SU-8 spin coat
Gavin Wu
2004-04-21
Dear all,

I am a novice on using SU-8. I've ordered MicroChem 2025 and tried to
spin-coat a 2" wafer. Since SU-8 is really thick and sticky, I applied it onto
the wafer surface before spinning with a small beaker instead of a pipette. I
also slowed down the accelerating ramp of the spinning chuck. But I've never
been able to get a uniform layer or smooth surface without streaks. I know the
problem might be in the bubbles generated when applying the SU-8, which is
kinda unavoidable. Anyone has a better idea on the *tool* (I mean beakers,
pipettes, etc) for applying SU-8? Or anyone know the secret of getting a
uniform layer?

I guess the answer could be somewhere in the archive. But I just need an
answer really quickly. Thanks very much.

Gavin



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