durusmail: mems-talk: Solvent for complete removal of photoresist MEGAPOSIT SPR 955 CM Series
Solvent for complete removal of photoresist MEGAPOSIT SPR 955 CM Series
Solvent for complete removal of photoresist MEGAPOSIT SPR 955 CM Series
Parijat Bhatnagar
2004-05-03
Can anybody suggest me a solvent for complete and effective removal of hard
baked, plasma treated photoresist "MEGAPOSIT SPR 955 CM Series" but still
leaving the HMDS primer monolayer intact on the Silicon Oxide surface. I
tried Acetone with Ultrasonic treatment for 5 minutes but it still left 10
nm of resist layer.

Sincerely,
Pari.



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