hi, everyone,

I am designing optical waveguide devices and would like the gap between
waveguides as small as possible. Could you please tell me how much the minimum
gap(side to side) conventional lithography technique with UV contact exposure
can separate with smooth photoresist edge, 1, 1.5 or 2 microns? I have only made
some directional couplers with 4microns gap, is ok. We are using AZ5214E
photoresist. I would apprecaite your early help.

Cheers

Yinlan Ruan
Laser Physics Center
Research School of Physical Science and Engineering
The Australian National University