durusmail: mems-talk: Dual-frequency water-proof SiN PECVD?
Dual-frequency water-proof SiN PECVD?
2004-05-10
Dual-frequency water-proof SiN PECVD?
Aldo Schina
2004-05-10
Hi,

how can I get a DUAL-FREQUENCY, water-proof & low stress silicon nitride in
P.E.C.V.D.?
Cordially
Aldo

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