Should be around 2.0.

--- Qing Yao  wrote:
> Hi,
>
>
> I was wondering if some one could tell me the
> typical value of refraction
> index of LPCVD Silicon Dioxide. It is deposited at
> about 420 degrees
> centigrade on a silicon wafer. I use a focus
> ellipsometer to measure its
> thickness. I tried 1.46 but got very large fit error
> (about 500). Please let
> me know if you have any information about this.
> Thanks!
>
>
> Best Regards,
>
>
> Qing Yao
> ___________________
> M&IE @ UIUC
>
>
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