I think it might be around 1.7-2.0

-Mike


>>> qingyao@uiuc.edu 5/14/2004 12:45:50 PM >>>
Hi,


I was wondering if some one could tell me the typical value of
refraction
index of LPCVD Silicon Dioxide. It is deposited at about 420 degrees
centigrade on a silicon wafer. I use a focus ellipsometer to measure
its
thickness. I tried 1.46 but got very large fit error (about 500).
Please let
me know if you have any information about this. Thanks!


Best Regards,


Qing Yao
___________________
M&IE @ UIUC


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