Hello,

I met a problem with Heidelberg DWL machine when I made mask. The machine
is to scan the blank mask to directly expose out the pattern on mask. My
problem is that I found the exposed area are not fully covered by the scan
line. After developing I can see the scan line and the unexposed area
between the scan line which I also want to expose. Did anybody has idea
about this problem? This is weekend and I can not reach the manufacture. So
I resort to this board to get a quick answer. Please reply directly to my
email address.
Thanks in advance.

Li Wang
Carnegie Mellon University