Hello All,

I am exposing a 260micron SU8 sample using a mask aligner from susstec.  We
calculated that for the power of the aligner, we need to expose it for 120sec.
I have
been told not to expose it all at once but instead break the exposure time up,
because
the heat generated can affect the SU8.  Currently I am doing 4 x 30sec exposure
with
one minute resting time in between each exposure.  This method works however, is
difficult because if the sample moves even a little bit then the alignment is
gone and the
sample is wasted.  Has anybody tried exposing samples for 120sec in one go?

Any comments or advise will be greatly appreciated.

Best Regards,

Christian Antonio.


__________________________________________________________

Christian Antonio

Industrial Research Institute Swinburne (IRIS)
533-545 Burwood Road,
Hawthorn, VIC., Australia 3122.
Tel :  +61 3  9214 5698
Fax : +61 3  9214 5050