Hi,

I have a problem with Ph diffusion. I used 1um thick thermal oxide as
masking material for Ph diffusion. The predeposition was run at 900C for
one hour and the drive was run at 1100C for half hour. However, I found
out that oxide peeled off at the edge of the pattern during the process
and caused lateral Ph diffusion underneath the oxide pattern.  Does
anyone know the cause of the peeling problem and the proper way to do
the Ph diffusion?

Thanks,

Jin

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Jin Zheng
Michigan Technological University
121 EERC Building, 1400 Townsend Dr.
Houghton, MI 49931