durusmail: mems-talk: TiO2 etching
TiO2 etching
TiO2 etching
Senthil Nathan Sambandam
1998-11-26
Hi there,

I am looking for etchants for titanium dioxide and few other oxides. Could
anyone suggest a reference where these information would be available. I
have alreday looked at etching tables in " Thin film processes" and "VLSI
fabrication principles". Any help is appreciated.


Senthil Nathan


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