durusmail: mems-talk: Metal Question
Metal Question
Metal Question
Rick Morrison
2004-06-08
Hi,

try Ni or Pt or TiW

Rick Morrison
Radant Mems

Rick


-----Original Message-----
From: mems-talk-bounces+rmorrison=radantmems.com@memsnet.org
[mailto:mems-talk-bounces+rmorrison=radantmems.com@memsnet.org]On Behalf
Of Tripp, Marie Kathleen
Sent: Tuesday, June 08, 2004 12:41 PM
To: General MEMS discussion
Subject: [mems-talk] Metal Question


Hi Everyone,  I was wondering if someone could suggest a metal which will
adhere to Alumina and can be patterned with liftoff and will survive (at
least for a while) in HF?  I tried Chromium but was unsuccessful.  I
throught that I'd ask before I tried too many other metals.

Thanks,
Marie

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