Hi Josef, I like to use a saw to pre-scribe wafers which I want to break later on. I use a normal dicing saw but only cut partially through the wafer on the backside. Then do my normal spinning, etc. for photo-litho. When I want to break the wafer later on the fracture lines are already defined. I like this technique because all of the mess and heat of dicing is done with before any of the photo- litho. Cheers, Marie