Cedric, A good article to refer to on SU-8 bonding would be as follows: S.K. Sampath, L.St.Clair, Xingtao Wu, D.V. Ivanov, Q. Wang, C.Ghosh, and K.R.Farmer, "Rapid MEMS Prototyping Using SU-8, Wafer Bonding and Deep Reactive Ion Etching,: Proceedings of the 14th Biennial University/Government/Industry Microelectronics Symposium, Richmond, VA, June 17-20, 2001 - IEEE Catalog No. 01CH37197 This article specifically deals with the bonding of patterned SU-8 to an etched silicon substrate. Best Regards, Chad Brubaker EV Group invent * innovate * implement Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail: C.Brubaker@EVGroup.com, www.EVGroup.com This message and any attachments contain confidential or privileged information, which is intended for the named addressee(s) only. If you have received it in error, please notify the sender immediately and then delete this e-mail. Please note that unauthorized review, copying, disclosing, distributing or otherwise making use of the information is strictly prohibited. -----Original Message----- From: mems-talk-bounces+c.brubaker=evgroup.com@memsnet.org [mailto:mems-talk- bounces+c.brubaker=evgroup.com@memsnet.org] On Behalf Of Cédric margo Sent: Thursday, June 10, 2004 12:49 AM To: mems-talk@memsnet.org Subject: [mems-talk] SU8-silicon bonding Hello, I want to make a microfluidic chip for biological analyses. The chip would be made like this: A SU8 layer is patterned by lithography onto a glass wafer to form a channel and reservoirs(typically, dimensions are 20µm*20µm for the smallest part of the channel). After that, a silicon wafer through etched (KOH) to form fluidic and electrical connexions would be bonded to the SU8 layer by heating of this last. I have still doubts about this step. So, I would appreciate any suggestion or related links about bonding of SU8 on silicon after the SU8 has been patterned by UV exposition. Best regards -- Cédric Margo - cedric.margo@lien.uhp-nancy.fr Laboratoire d'Instrumentation Electronique de Nancy Faculté des Sciences et Techniques Boulevard des Aiguillettes - BP 239 54506 Vandoeuvre les Nancy - FRANCE Tel:03 83 68 41 56 fax:03 83 68 41 53 http://www.lien.uhp-nancy.fr _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/