Abang,

There are several things that can be done to increase the adhesion of
SU-8 to glass...

> Include an adhesion promoter to the process - A very good one to
select is AP300 from Silicon Resources. This is spin coated onto the
glass and then overcoated with the SU-8 and processed as normal.
> Increase the softbake time to drive more of the solvent out as you may
have a retained solvent that is being dissolved during development. This
can be a problem if the glass is thicker than a Si wafer, which is the
substrate that was used to define the process setpoints.
> Increase the Exposure dose to create more acid which will then cause a
"better" cure or crosslink profile.
> But overall if an optimised softbake, exposure and PEB process is used
the adhesion should be within acceptable limits.

For further information please do not hesitate to contact me.

Mark Shaw
Regional Sales Manager
MicroChem Corp.

Tel : 617-965-5511 ext 308
Cell: 617-407-9490
Fax: 617-831-2354

------------------------------

Message: 8
Date: Tue, 15 Jun 2004 08:55:15 +0800
From: "annuar" 
Subject: [mems-talk] SU-8 adhesion to glass substrate
To: 
Message-ID: 
Content-Type: text/plain;       charset="iso-8859-1"

Hi everyone.
I'm having problem coating my glass slide with SU-8 resist. It seems
that the SU-8 does not adhere very well to glass. After developing, some
part of my patterns are lifted off. Does anyone know how to solve this
problem? Does the softbake or PEB have anything to do with this? Thanks.

Abang Annuar






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