durusmail: mems-talk: Wafer bonding with glass
Wafer bonding
2004-06-16
2004-06-16
Wafer bonding with glass
2004-06-17
Photoresist removal after ion milling
2004-06-17
2004-06-17
Brent Garber (2 parts)
Wafer bonding with glass
Kirt Williams
2004-06-17
Can anyone recommend a U.S.-located vendor depositing a 1- to 5-um-thick
glass film onto silicon wafers
for either anodic bonding or thermocompression bonding?
One with experience in both deposition and bonding is preferred.
It appears that glass frit will not work for my application as I need finer
lines and a thinner film.

The moderator requests that you send replies only to me.

  Kirt R. Williams, Ph.D., P.E.
  Senior Scientist, SAIC
  kirt.r.williams@saic.com



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