Dhanamjaya--
See the this paper
http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates1(1996).pdf
in which etch rates and containers are discusses.
    --Kirt Williams

----- Original Message -----
From: "Dhanamjaya R Guda" 
To: 
Sent: Tuesday, June 15, 2004 11:34 AM
Subject: [mems-talk] Container for KOH etching
> I have a question  regarding the SiO2 etching which I am planning to use
as
> the mask.
>     I want to use BOE as the etchant.Does any one have any particular idea
> about the etch rate of SiO2 in BOE ( what would be the concentration
> profile). and
>    what conatiner can i use for etching of Silicon using KOH.
> I would really appriciate if any one go a head and answer to these
> questions.
>
> Thanks,
> Dhanamjaya Reddy Guda
> Louisiana State University,
> Department of Mechanical Engineering
> Ph.No: 225-578-4412