Dear all,
I am trying to add a compensation structure to the convex corner of <100>Si
spring and etch it in KOH+water. Could you please advice me about how can I
choose the right dimension of these structure.
Cheers,
Nibras

-----Original Message-----
From: mems-talk-request@memsnet.org
To: mems-talk@memsnet.org
Date: Mon, 21 Jun 2004 02:00:51 +1000 (EST)
Subject: MEMS-talk Digest, Vol 20, Issue 22

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